Description

• Microprocessor* controller allows for complete automatic processing.
• Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
• Internal surfaces inert to CO2, ultra pure alcohols and acetone.
• Repeatable operating parameters insuring reproducibility of results.
• Process up to 5 x 10mm square die or 5 x 1″ diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders* are used to transport and process your MEMS devices minimizing handling).
• Integrated temperature controls.*
• Internal rupture disc built in for safety.
• LED’s instantly indicate process mode at a glance.*
• Clean room static-free compatible design.
• Complete advanced solid state reliable electronics.
• Efficient adiabatic cooling system*; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
• All electronic components meet CE, UL and/or U.S. Military Specifications.
• Static pressure control module pre-set for automatic safe pressure stability.
• 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
• Under-lit chamber with viewing window facilitates operator chamber status viewing.
• Vernier Handle Meter Valves allow for repeatable precision flow control.
• SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).
• Cabinet: 14.0″ (35.6cm) Width x 10.25″ (26.0cm) Height x 21.5″ (54.6cm) Length
• System Set-Up Area Required: 36″ (92cm) Width x 30″ (76cm) Depth
• Chamber size: 1.25″ I.D. x 1.25″ Depth, Chamber volume: 25 ml
• Temperature gauge range: -30°C to 60°C
• Pressure gauge range: 0 to 2,000 psi
• Purge Timer Range: 0 – 45 minutes