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815 SerB – 1″ Automatic CPD Cleanroom Version

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Description

 

  • Microprocessor* controller allows for complete automatic processing.
  • Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
  • Internal surfaces inert to CO2, ultra pure alcohols and acetone.
  • Repeatable operating parameters insuring reproducibility of results.
  • Process up to 5 x 10mm square die or 5 x 1″ diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders* are used to transport and process your MEMS devices minimizing handling).
  • Integrated temperature controls.*
  • Internal rupture disc built in for safety.
  • LED’s instantly indicate process mode at a glance.*
  • Clean room static-free compatible design.
  • Complete advanced solid state reliable electronics.
  • Efficient adiabatic cooling system*; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Static pressure control module pre-set for automatic safe pressure stability.
  • 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
  • Under-lit chamber with viewing window facilitates operator chamber status viewing.
  • Vernier Handle Meter Valves allow for repeatable precision flow control.
  • SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).
  • Cabinet: 14.0″ (35.6cm) Width x 10.25″ (26.0cm) Height x 21.5″ (54.6cm) Length
  • System Set-Up Area Required: 36″ (92cm) Width x 30″ (76cm) Depth
  • Chamber size: 1.25″ I.D. x 1.25″ Depth, Chamber volume: 25 ml
  • Temperature gauge range: -30°C to 60°C
  • Pressure gauge range: 0 to 2,000 psi
  • Purge Timer Range: 0 – 45 minutes

 

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